Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma

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Authors

GRANIER A. BEGOU T. DUQUENNE C. DJOUADI M.A. FENG X. BURŠÍKOVÁ Vilma ZAJÍČKOVÁ Lenka

Year of publication 2007
Type Article in Proceedings
Conference 18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords DLC;PECVD;HMDSO;mechanical properties
Description Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma
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