Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma

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Authors	GRANIER A. BEGOU T. DUQUENNE C. DJOUADI M.A. FENG X. BURŠÍKOVÁ Vilma ZAJÍČKOVÁ Lenka
Year of publication	2007
Type	Article in Proceedings
Conference	18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	DLC;PECVD;HMDSO;mechanical properties
Description	Structure and properties of DLC/SiOx films deposited in CW and pulsed plasma
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