Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment

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Authors	COLOMBI Paolo AGNIHOTRI Dileepa ASADCHIKOV V. E. BONTEMPI Elza BOWEN D. Keith CHANG Chang-Hwan DEPERO Laura E. FARNWORTH Mark FUJIMOTO Toshiyuki GIBAUD Alan JERGEL Matej KRUMREY Michael LAMPERTI Alessio LAFFORD Tamzin MATYI Richard J MA T. MEDUŇA Mojmír MILITA Silvia SAKURAI Kenji SHABEL'NIKOV Leonid ULYANENKOV Alexander LEE A. van der WIEMER Claudia
Year of publication	2008
Type	Article in Periodical
Magazine / Source	J. Appl. Crystallography
MU Faculty or unit	Faculty of Science
Citation
Web	http://scripts.iucr.org/cgi-bin/paper?he5386
Field	Solid matter physics and magnetism
Keywords	x-ray reflectometry; round robin; layer structures
Description	X-ray reflectometry (XRR) is a well established technique to evaluate quantitatively electron density, thickness and roughness of thin layers. In this paper, results of the first world-wide XRR round-robin experiment, involving 20 laboratories, are presented and discussed. The round-robin experiment was performed within the framework of the VAMAS Project "X-ray reflectivity measurements for evaluation of thin films and multilayers", the aim of which is to produce a good practice manual for XRR. The reproducibility of measurements obtained using different equipment has been investigated. The influence of the fitting of the experimental data was shown to be non-negligible compared with the experimental factors. The dynamic intensity range proves to be an important parameter for obtaining a good quality measurement.
Related projects:	Physical and chemical properties of advanced materials and structures