Development of oxide precipitates in silicon: calculation of the distribution function of the classical theory of nucleation by a nodal-points approximation

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Authors

KUBĚNA Josef KUBĚNA Alan CAHA Ondřej MIKULÍK Petr

Year of publication 2007
Type Article in Periodical
Magazine / Source J. Phys. Condens. Matter
MU Faculty or unit

Faculty of Science

Citation
Web http://www.iop.org/EJ/abstract/0953-8984/19/49/496202/
Field Solid matter physics and magnetism
Keywords silicon; theory of nucleation; cluster distribution; oxygen precipitation; annealing
Description The classical theory of nucleation in solids is mathematically expressed by a system of differential equations for temporal development of cluster distribution (sizes and their concentration). The full numerical simulation grows linearly with the number of equations, making the numerical solution extremely time-consuming. In this paper we develop a nodal-points approximation method with a logarithmic efficiency, which allows us to calculate the cluster distribution very quickly.
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