Model of reactive magnetron sputtering process with non-uniform discharge current density

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Authors	VAŠINA Petr HYTKOVÁ Tereza ELIÁŠ Marek
Year of publication	2007
Type	Article in Proceedings
Conference	Proceeding of XXVIII International Conference on Phenomena in Ionized Gases
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	magnetron sputtering; reactive; Berg
Description	Model of reactive magnetron sputtering process with non-uniform discharge current density, proceeding
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