Model of reactive magnetron sputtering process with non-uniform discharge current density

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Authors

VAŠINA Petr HYTKOVÁ Tereza ELIÁŠ Marek

Year of publication 2007
Type Article in Proceedings
Conference Proceeding of XXVIII International Conference on Phenomena in Ionized Gases
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords magnetron sputtering; reactive; Berg
Description Model of reactive magnetron sputtering process with non-uniform discharge current density, proceeding
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