Determination of electron temperature in neon RF discharge by means of collisional-radiative model
| Authors | |
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| Year of publication | 2007 |
| Type | Article in Proceedings |
| Conference | Proceedings of ICPIG XXVIII |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | neon RF discharge; optical emission spectroscopy; collisional-radiative model |
| Description | A collisional-radiative model was used to determine the electron temperature in capacitively coupled RF (13.56 MHz) discharge in neon. Two discharge regimes at different pressures were investigated. The temperature was determined from the fit of the theoretical spectra to the spectra measured by optical emission spectroscopy. Three kinds of electron distribution function - Maxwellian, Bi-Maxwellian and Pseudo-Bi-Maxwellian - were considered. The results were compared with Particle-in-Cell/ Monte-Carlo simulation. The comparison of the fitted calculated and measured spectra shows a good agreement between the theory and experiment. The electron temperature, which was estimated from the fits, was approx. 6 eV in the sheath at neon pressure of 10 Pa and approx. 2 eV in the bulk plasma at neon pressure of 80 Pa. |
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