Efficient excimer source in rare gases/chlorine mixtures

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Authors	BRABLEC Antonín GUIVAN N. N. SŤAHEL Pavel
Year of publication	2006
Type	Article in Proceedings
Conference	7th International Balkan Workshop on Applied Physics - Abstracts
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Surface Barrier Discharge; Excimer mixtures
Description	Parameters of efficient source of excimer radiation generated in rare gases/chlorine mixtures are investigated by OES.
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