Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings

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Authors

BURŠÍKOVÁ Vilma ZAJÍČKOVÁ Lenka FRANTA Daniel JANČA Jan BURŠÍK Jiří KLAPETEK Petr BLÁHOVÁ Olga PEŘINA Vratislav NAVRÁTIL Vladislav

Year of publication 2006
Type Article in Proceedings
Conference 7th International Balkan Workshop on Applied Physics - Abstracts
MU Faculty or unit

Faculty of Education

Citation
Field Plasma physics
Keywords PECVD; Nanostructured silicon-oxide Containing Diamond-like Carbon; thin films; mechanical properties; tribological properties;RBS; ERDA;
Description Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings was studied in this work by means of measurements of mechanical, optical and electrical properties of Thin Films.
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