RF plasma pencil - charakteristics and application

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Authors

KLÍMA Miloš SLAVÍČEK Pavel BURŠÍKOVÁ Vilma HAVEL Josef ŠPALT Zbyněk VANĚK Pavel

Year of publication 2006
Type Article in Proceedings
Conference Proceedings 3rd International Workshop on Microplasmas
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords plasma pencil; plasma jet; plasma diagnostics
Description Radiofrequency plasma pencil - characteristics and application of surface treatment.
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