Reakce (NPF2)3 v kapacitně vázaném plazmatu

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Title in English Reaction of (NPF2)3 in capacitively coupled plasma
Authors

VORÁČ Zbyněk ALBERTI Milan URBANČÍK Petr JANČA Jan

Year of publication 2005
Type Article in Periodical
Magazine / Source ChemZi
MU Faculty or unit

Faculty of Science

Citation
Field Inorganic chemistry
Keywords Hexafluoro-cyclo-triphosphazene; polymerization; microwave plasma; mass spectrometry
Description Reaction of (NPF2)3 in capacitively coupled plasma was studied. The polymer layers was studied by means LDI-TOF MS and two groups of fluorophosphazene oligomers were detected in protonised or hydrated form.
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