Redukce wolframanových prekurzorů v plazmatu buzeném ve směsi vodíku a vhodného uhlovodíku

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Title in English	Reduction of tungsten precursors by plasma excited in hydrogen and hydrocarbon mixtures
Authors	BROŽEK Vlastimil ELIÁŠ Marek JANČA Jan
Year of publication	2005
Type	Article in Periodical
Magazine / Source	ChemZi 57.sjezd chemických společností
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Reduction; tungsten precursors; plasma; hydrogen; hydrocarbon mixtures
Description	Reduction of tungsten precursors by plasma excited in hydrogen and hydrocarbon mixtures
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface