PECVD a opracování povrchu materiálů v nízkotlakých výbojích

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Title in English PECVD and treatment of surfaces in low pressure discharges
Authors

ZAJÍČKOVÁ Lenka

Year of publication 2005
Type R&D Presentation
MU Faculty or unit

Faculty of Science

Citation
Description The presentations covers plasma technologies used for deposition of thin films and treatment of surfaces.
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