Organosilicon reactions with atoms: HMDSZ + N

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Authors	KUDRLE Vít TÁLSKÝ Antonín JANČA Jan
Year of publication	2005
Type	Article in Periodical
Magazine / Source	Acta Physica Slovaca
MU Faculty or unit	Faculty of Science
Citation	KUDRLE, Vít, Antonín TÁLSKÝ and Jan JANČA. Organosilicon reactions with atoms: HMDSZ + N. Acta Physica Slovaca. Bratislava: Institute of Physics, SAS, 2005, vol. 55, No 5, p. 487-490. ISSN 0323-0465.
Field	Plasma physics
Keywords	afterglow; nitrogen; EPR; organosilicon; hexamethyldisilazane
Attached files	487.pdf
Description	Using electron paramagnetic resonance technique, we determined the kinetic constant of HMDSZ + N reaction in plasma afterglow.
Related projects:	Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates