Preionised pulsed magnetron discharges for ionised physical vapour deposition

• Authors: GANCIU Mihai; KONSTANTINIDIS Stephanos; PAINT Yoann; DAUCHOT Jean-Pierre; HECQ Michel; DE POUCQUES Ludovic; VAŠINA Petr; MEŠKO Marcel; IMBERT Jean-Christophe; BRETAGNE Jean; TOUZEAU Michel
• Year of publication: 2005
• Type: Article in Periodical
• Magazine / Source: Journal of Optoelectronics and Advanced Materials
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: pulsed magnetron; preionization; transport processes
• Description: To improve the quality of thin film deposition by magnetron discharges, particularly by an effective ionisation of the sputtered vapour, we developed a new ionised physical vapour deposition (IPVD) method based on preionised Pulsed magnetron discharges. By superposition of continuous, microwave or RF discharge, with a fast pulsed abnormal discharge, target current density is extended to very high values during short pulses. Efficient vapour ionisation is obtained and due to the current pulse shortness, electric arc development is avoided.

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