Spectroscopic analysis of a pulsed magnetron discharge

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Authors	VAŠINA Petr MEŠKO Marcel IMBERT Jean-Christophe DE POUCQUES Ludovic TEULÉ-GAY Lionel BOISSE-LAPORTE Caroline BRETAGNE Jean PAGNON Daniel TOUZEAU Michel GANCIU Mihai
Year of publication	2005
Type	Article in Periodical
Magazine / Source	Journal of Optoelectronics and Advanced Materials
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	pulsed magnetron; spatially resolved diagnostics; time resolved diagnostics; transport processes; preionisation
Description	To investigate the generation and transport of ions during and after a high power current pulse applied on magnetron cathode, we performed spectroscopic measurements with time and space resolution. The microwave antennas placed between target and substrate ensure proper conditions of current pulse development, ion transport and., by re-exciting sputtered species, allows spectroscopic emission measurements of species transported towards the substrate. Measured data are presented and discussed.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Pokročilé směry ve fyzice a chemii plazmatu