Complex study of the mechanical properties of a-Si:H and a-SiC:H thin films

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Authors

BURŠÍKOVÁ Vilma SLÁDEK Petr SŤAHEL Pavel BURŠÍK Jiří

Year of publication 2005
Type Article in Proceedings
Conference Book of abstract - ICANS 21
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords amorphous semiconductor; mechanical properties; thin film
Description The aim of this study is to provide the complex study of the mechanical properties of a-SiH and a-SiC:H thin films prepared under different plasma conditions.
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