Optical emission spectroscopy of surfatron generated plasma in Ar + O2 and N2 + O2 mixtures

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Authors

NAVRÁTIL Zdeněk SLAVÍČEK Pavel STRAŇÁK Vítězslav ŠERÝ Michal TICHÝ Milan TRUNEC David ŠPATENKA Petr SŤAHEL Pavel

Year of publication 2005
Type Article in Proceedings
Conference Proceedings of ICPIG XXVII
MU Faculty or unit

Faculty of Science

Citation
Web http://www.icpig2005.nl
Field Plasma physics
Keywords emission spectroscopy surfatron microwave
Description In this study surfatron-generated plasma in Ar + O2 and N2 + O2 gas mixtures was studied by means of optical emission spectroscopy. The surfatron powered by a microwave magnetron generator working at frequency 2.45 GHz in the output power range 0 300 W created plasma from the flowing gas in a quartz tube. The total gas flow rate was kept constant at 600 sccm but the ratio of individual gas flows was varied. Paper discusses results of optical emission spectroscopy: axial variations of radiation of various neutral species in the plasma as well as axial development of rotational and vibrational temperature determined from OH and N2 emission.
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