Influence of the temperature on properties of plasma polymerised organosilicon coatings

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Authors	KUČEROVÁ Zuzana BURŠÍKOVÁ Vilma PEŘINA Vratislav FRANTA Daniel ZAJÍČKOVÁ Lenka ČECH Jan FRANCLOVÁ Jana
Year of publication	2005
Type	Article in Proceedings
Conference	15th Symposium on applications of plasma processes
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	coatings
Description	The objective of the present paper is a study of thermal effected changesin a composition and structure of plasma polymerized organosilicon coatings.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface