Optical emission spectroscopy of argon plasma generated by surfatron at frequency 2.45 GHz
| Authors | |
|---|---|
| Year of publication | 2004 |
| Type | Article in Proceedings |
| Conference | Proceedings of the 17th Escampig 2004 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | surfatron plasma; argon; optical emission spectroscopy |
| Description | The paper presents results of optical emission spectroscopy study of surfatron-based argon plasma. Plasma is formed in quartz tube, which is placed in the surfatron cavity powered by a microwave magnetron generator working with frequency 2.45 GHz. The plasma inside the tube is sustained downstream by a surface wave, which propagates along the plasma column. The quartz nozzle ends in a vacuum chamber pumped by a rotary oil pump. The pressure inside the chamber as well as the flow rate of the working gas is independently variable. We estimated plasma parameters as rotational and vibrational temperature from the measured spectra of OH and N2. |
| Related projects: |