Thermal stability of coatings prepared in atmospheric pressure glow discharge

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Authors

ČECH Jan SŤAHEL Pavel ŠÍRA Martin BURŠÍKOVÁ Vilma NAVRÁTIL Zdeněk TRUNEC David BRABLEC Antonín

Year of publication 2004
Type Article in Periodical
Magazine / Source Czech. J. Phys.
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords thermal stability; atmospheric pressure glow discharge; deposition
Description In order to better understand the relations between the deposition conditions, the microstructure and hydrogen and/or nitrogen incorporation in polymeric films the thermal stability of coatings prepared in atmospheric pressure glow discharge was studied. The polymeric films were prepared from the mixture of hexamethyldisiloxane (HMDSO) or hexamethyldisilazane (HMDSZ) with nitrogen in atmospheric pressure glow discharge (APGD). The hydrogen and/or nitrogen evolved from polymeric films were studied by TDS.
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