Reduction of tungsten precursors in inductive rf discharge plasma reactors

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Authors

JANČA Jan ELIÁŠ Marek BROŽEK Vlastimil

Year of publication 2003
Type Article in Periodical
Magazine / Source High Temperature Material Processes
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords tungsten; tungsten carbide; plasma reduction; plasma carbidization;inductive coupled .h.f. plasma reactor
Description Ammonium paratungstate (APT) was reduced in inductively coupled h.f. plasma reactor(4 MHz,2 kW). As working gas was used hydrogen. If the mixture of hydrogen with hydrocarbon is used (methane, propan butane)it is possible to prepare also tungsten carbide in the ratio up to WC/W=80/20.
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