Deposition of Hard carbon films and Its Diagnostics

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Authors

FRGALA Zdeněk KUDRLE Vít JANČA Jan

Year of publication 2003
Type Article in Proceedings
Conference Proceedings of the XIVth SAPP
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Diamond; microwave plasma CVD
Description We studied the growth of microcrystalline diamond films on pre-treated Si and WC-Co substrates by microwave plasma chemical vapour deposition (MPCVD). The pre-treatment was varied and its effect on diamond film was studied.
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