Deposition of Hard carbon films and Its Diagnostics

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Authors	FRGALA Zdeněk KUDRLE Vít JANČA Jan
Year of publication	2003
Type	Article in Proceedings
Conference	Proceedings of the XIVth SAPP
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Diamond; microwave plasma CVD
Description	We studied the growth of microcrystalline diamond films on pre-treated Si and WC-Co substrates by microwave plasma chemical vapour deposition (MPCVD). The pre-treatment was varied and its effect on diamond film was studied.
Related projects:	Study of plasmachemical processes using microwave and optical spectroscopy Research and development and industrializartion of novel super hard nanocrystalline materials Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates