Electron density measurements in pulsed microwave discharge in nitrogen gas

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Authors	MEŠKO Marcel VAŠINA Petr KUDRLE Vít FRGALA Zdeněk JANČA Jan
Year of publication	2003
Type	Article in Proceedings
Conference	Proceedings of contributed papers WDS'03
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	electron density; microwave interferometer; high power; pulse
Description	Electron density measurements in pulsed microwave discharge in nitrogen gas
Related projects:	Study of plasmachemical processes using microwave and optical spectroscopy Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates