Study of reaction between HMDSO and O atoms in afterglow

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Authors

KUDRLE Vít DOLEŽAL Vojtěch TÁLSKÝ Antonín JANČA Jan

Year of publication 2003
Type Article in Proceedings
Conference Proceedings of ISPC 14
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords plasmachemical reaction; HMDSO; EPR
Attached files
Description In this work the kinetics of reactions between atomic oxygen and HMDSO was studied. Rate constant was measured by means of electron paramagnetic resonance spectroscopy.
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