Plasma potential in low-pressure capacitive r.f. discharges

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Authors	DVOŘÁK Pavel ZAJÍČKOVÁ Lenka JANČA Jan
Year of publication	2003
Type	Article in Proceedings
Conference	WDS'03 Proceedings of contributed papers, part 2
MU Faculty or unit	Faculty of Informatics
Citation
Field	Plasma physics
Keywords	plasma potential; hydrogen; Langmuir probe
Description	We observed two different discharge modes in hydrogen. The modes differed significantly in a visual appearance, plasma potential and in the shape of electron energy distribution function. In order to explain it we established a simple model anabling an aproximate calculation of the plasma potential. This model is not capable to predict real values of the plasma potential but it can qualitatively explain the observed effect.
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates