Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge

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Authors	NAVRÁTIL Zdeněk ZAJÍČKOVÁ Lenka SŤAHEL Pavel BURŠÍKOVÁ Vilma ČECH Jan KUČEROVÁ Zuzana TRUNEC David
Year of publication	2003
Type	Article in Proceedings
Conference	Proceedings of 16th ISPC
MU Faculty or unit	Faculty of Informatics
Citation
Field	Plasma physics
Keywords	Deposition; thin organosilicon polymer films; atmospheric pressure; glow discharge
Description	Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge
Related projects:	Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Deposition of thin films and surface modifications in silent and glow discharges at atmospheric pressure Application of surface discharge at atmospheric pressure for the modification of the surfaces and deposition of polymer protective coatings Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates