Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion

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Authors

SLÁDEK Petr SŤAHEL Pavel

Year of publication 2002
Type Article in Proceedings
Conference Conference Proceedings of Inter-Academia 2002
MU Faculty or unit

Faculty of Education

Citation
Field Plasma physics
Keywords plasma deposition;surface energy; atmospheric discharge
Description Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion
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