Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study

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Authors

ANOPCHENKO A. JERGEL M. MAJKOVA E. HOLY V.

Year of publication 2001
Type Article in Periodical
Magazine / Source Physica B
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Description Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study
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