Měření základních statistických veličin náhodné povrchové drsnosti pomocí mikroskopie atomové síly
| Title in English | Measurement of Basic Statistical Quantities of Statistical Roughness by Atomic Force Microscopy |
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| Authors | |
| Year of publication | 2001 |
| Type | Article in Periodical |
| Magazine / Source | Československý časopis pro fyziku |
| MU Faculty or unit | |
| Citation | |
| Web | http://hydra.physics.muni.cz/~franta/bib/CCF51_16.html |
| Field | Solid matter physics and magnetism |
| Description | In this paper a rewiev of the statistical quantities of randomly rough surfaces important from the practical point of view is presented. Further, procedures of measuring these quantities using atomic force microscopy (AFM) are described. The procedures are illustrated by means of the results achieved for randomly rough surfaces of silicon single crystal. A discussion of the errors having an influence on the values of the statistical quantities measured using AFM is presented as well. The results obtained for the rough silicon single crystal surfaces using AFM are compared with those achieved for these surfaces by optical methods. |
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