A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon

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Authors	BEHNKE J.F. PASOTH E. CSAMBAL C. TICHÝ Milan KUDRNA Pavel TRUNEC David BRABLEC Antonín
Year of publication	1999
Type	Article in Periodical
Magazine / Source	Czech. Journal of Phys.
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	electron distribution function; magnetron; discharges
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates