A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon

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Authors

BEHNKE J.F. PASOTH E. CSAMBAL C. TICHÝ Milan KUDRNA Pavel TRUNEC David BRABLEC Antonín

Year of publication 1999
Type Article in Periodical
Magazine / Source Czech. Journal of Phys.
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords electron distribution function; magnetron; discharges
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