Self-assembled carbon-induced germanium quantum dots studied by grazing-incidence small-angle x-ray scattering

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Authors	STANGL J. HOLÝ Václav MIKULÍK Petr BAUER G. KEGEL I. METZGER T.H. SCHMIDT O.G. LANGE C. EBERL K.
Year of publication	1999
Type	Article in Periodical
Magazine / Source	Applied Physics Letters
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	quantum dots; MBE; GISAXS
Description	We present a structural investigation of buried C-induced Ge quantum dot multilayers grown on (001) Si by molecular-beam epitaxy. Using grazing-incidence small-angle x-ray scattering, we determine the shape, the mean radius, height, and dot distance. The dot distribution is isotropic within the (001) interfaces, and no correlation of the dot positions along growth direction was found.
Related projects:	Physical properties of new materials and layered structures