Self-assembled carbon-induced germanium quantum dots studied by grazing-incidence small-angle x-ray scattering

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Authors

STANGL J. HOLÝ Václav MIKULÍK Petr BAUER G. KEGEL I. METZGER T.H. SCHMIDT O.G. LANGE C. EBERL K.

Year of publication 1999
Type Article in Periodical
Magazine / Source Applied Physics Letters
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords quantum dots; MBE; GISAXS
Description We present a structural investigation of buried C-induced Ge quantum dot multilayers grown on (001) Si by molecular-beam epitaxy. Using grazing-incidence small-angle x-ray scattering, we determine the shape, the mean radius, height, and dot distance. The dot distribution is isotropic within the (001) interfaces, and no correlation of the dot positions along growth direction was found.
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