Comparison of optical and non-optical methods for measuring surface roughness

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Authors

OHLÍDAL Ivan OHLÍDAL Miloslav FRANTA Daniel TYKAL Miroslav

Year of publication 1999
Type Article in Proceedings
Conference Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
MU Faculty or unit

Faculty of Science

Citation
Web http://hydra.physics.muni.cz/~franta/bib/SPIE3820_456.html
Field Solid matter physics and magnetism
Keywords Coherent optics; Surface roughness; Metrology
Description The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented.
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