Determination of the basic parameters characterizing the roughness of metal surfaces by laser light scattering

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Authors

OHLÍDAL Miloslav UNČOVSKÝ Marek OHLÍDAL Ivan FRANTA Daniel

Year of publication 1999
Type Article in Periodical
Magazine / Source Journal of modern optics
MU Faculty or unit

Faculty of Science

Citation
Web http://hydra.physics.muni.cz/~franta/bib/JMO46_279.html
Field Solid matter physics and magnetism
Description A method of determination of the basic morphology parameters of rough metal surfaces with periodic and random components of surface roughness by means of laser light scattering is presented. The method is based on interpreting the angular distribution of the laser light intensity scattered from such surfaces. The theory of the method is based on the scalar theory of diffraction and basic theorems of data processing. The new, more general way of interpreting experimental data is specified. It can also be used for the analysis of samples with quasiperiodic and random components of surface roughness; this is the case when standard measurement by means of stylus profilometer can give incorrect results.
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