Ellipsometric parameters and reflectances of thin films with slightly rough boundaries

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Authors

FRANTA Daniel OHLÍDAL Ivan

Year of publication 1998
Type Article in Periodical
Magazine / Source Journal of modern optics
MU Faculty or unit

Faculty of Science

Citation
Web http://hydra.physics.muni.cz/~franta/bib/JMO45_903.html
Field Optics, masers and lasers
Description In this theoretical paper formulae for important optical quantities of single layers with slightly randomly rough boundaries are derived by means of a generalized Rayleigh-Rice theory. Thus the formulae for the specular reflectances, ellipsometric parameters and flux of scattered energy of the layers mentioned are presented. The theoretical results are illustrated by a numerical analysis. Practical features implied by this analysis to be relevant from the experimental point of view are introduced as well.
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