Influence of deposition parameters on mechanical properties of plasma deposited silicon oxide films on polycarbonates

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Authors	BURŠÍKOVÁ Vilma ZAJÍČKOVÁ Lenka JANČA Jan
Year of publication	1997
Type	Article in Proceedings
Conference	WDS97
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates