Kinetika reakcí plynné fáze O_2+TEOS v řízeném rf reaktoru s elektronovou spinovou rezonancí

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Title in English	Kinetics of O_2 + TEOS gas-phase chemical reactions in remote RF plasma reactor with electron spin resonance
Authors	JANČA Jan TÁLSKÝ Antonín ZVONÍČEK Vilém
Year of publication	1996
Type	Article in Periodical
Magazine / Source	Plasma Chemistry and Plasma Processing
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates