Depozice a charakterizace organosilikonových tenkých vrstev ze směsi TEOS+O2

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Title in English Deposition and characterization of organosilicon thin films from TEOS + O2 gas mixture
Authors

JANČA Jan NAVRÁTIL Karel BOCHNÍČEK Zdeněk PEŘINA V.

Year of publication 1995
Type Article in Periodical
Magazine / Source Czechoslovak Journal of Physics
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
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