Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers

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Authors

OHLÍDAL Ivan VOHÁNKA Jiří MISTRÍK Jan ČERMÁK Martin FRANTA Daniel

Year of publication 2018
Type Article in Periodical
Magazine / Source Surface and Interface Analysis
MU Faculty or unit

Faculty of Science

Citation
Web odkaz na stránku nakladatele
Doi http://dx.doi.org/10.1002/sia.6463
Keywords native oxide layers;optical characterization;roughness;silicon surfaces
Description Results of the optical characterization of randomly rough silicon surfaces covered with native oxide layers based on processing experimental data obtained by ellipsometry and reflectometry are presented. It is shown that the Rayleigh-Rice theory is suitable theoretical approach for characterizing micro-rough surfaces in contrast to effective medium approximation. Combination of the Rayleigh-Rice theory and scalar diffraction theory is efficient and reliable approach for characterizing rougher surfaces with the rms values of heights larger than 10 nm. Thickness of native oxide layers and roughness parameters, ie, the rms values of heights and autocorrelation lengths, are determined for micro-rough and rougher surfaces using the corresponding theoretical approaches.
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