Zařízení pro plazmovou úpravu povrchů substrátů

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Title in English	A device for plasma treatment of surfaces
Authors	HOMOLA Tomáš KRUMPOLEC Richard ZEMÁNEK Miroslav KELAR Jakub ČERNÁK Mirko
Year of publication	2018
MU Faculty or unit	Faculty of Science
Web	https://isdv.upv.cz/webapp/resdb.print_detail.det?pspis=PUV/33960&plang=CS
Description	A technical solution of the device for plasma treatment of structure surfaces, i.e. surfaces featuring non-uniformities, and/or structures of various shape and dimensions.
Related projects:	Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy