Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution

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Authors

VODÁK Jiří NEČAS David OHLÍDAL Miloslav OHLÍDAL Ivan

Year of publication 2017
Type Article in Periodical
Magazine / Source Measurement Science and Technology
MU Faculty or unit

Faculty of Science

Citation
Web http://iopscience.iop.org/article/10.1088/1361-6501/aa5534/meta
Doi http://dx.doi.org/10.1088/1361-6501/aa5534
Keywords enhanced spatial resolution; high gradient thickness distribution; imaging spectroscopic reflectometer; non-uniform thin films
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Description In this paper an imaging spectroscopic reflectometer with enhanced spatial resolution is presented. Main features of its design, experimental data acquisition, i.e. maps of thin film spectral dependencies of local reflectance and the local thickness map determination are described. The ability of this instrument to characterize thin film thickness non-uniformity with high gradients is demonstrated on measurements of thin film edges. A comparison with an older device is also presented.
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