Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications

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Authors	FALUB Claudiu Valentin HIDA Rachid MEDUŇA Mojmír ZWECK Josef MICHEL Jean-Philippe SIBUET Henri SCHNEIDER Daniel BLESS Martin RICHTER Jan H. ROHRMANN Hartmut
Year of publication	2017
Type	Article in Periodical
Magazine / Source	IEEE TRANSACTIONS ON MAGNETICS
MU Faculty or unit	Faculty of Science
Citation
Web	http://ieeexplore.ieee.org/abstract/document/7924320/
Doi	http://dx.doi.org/10.1109/TMAG.2017.2703175
Field	Solid matter physics and magnetism
Keywords	FeCoB; high-frequency permeability; magnetic multilayers; magnetron sputtering; soft magnetic materials
Description	In this paper, we studied the structural and magnetic properties of amorphous FeCoB/AlN multilayered thin films with in-plane uniaxial magnetic anisotropy based on the Fe-28% Co-20% B (at. %) alloy, deposited on 8 '' Si/200 nm-thermal-SiO2 wafers in an industrial, high-throughput magnetron sputtering system.
Related projects:	CEITEC - Central European Institute of Technology CEITEC - open access CEITEC 2020