Boron-based thin layers deposited by RF plasma jet with slit nozzle

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Authors	PIJÁKOVÁ Barbora ALBERTI Milan ALBERTI Milan KLÍMA Miloš KLÍMA Miloš
Year of publication	2016
Type	Article in Proceedings
Conference	HAKONE XV: INTERNATIONAL SYMPOSIUM ON HIGH PRESSURE LOW TEMPERATURE PLASMA CHEMISTRY: WITH JOINT COST TD1208 WORKSHOP: NON-EQUILIBRIUM PLASMAS WITH LIQUIDS FOR WATER AND SURFACE TREATMENT
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	friction coefficient; RF plasma jet; trimethyl borate
Description	Preparation of thin layers with low friction coefficient using RF atmospheric pressure plasma slit jet system with addition of organic precursor aerosol.
Related projects:	CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy Research center of surface treatment Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy