Titanium Atom and Ion Number Density Evolution in Reactive HiPIMS
| Authors | |
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| Year of publication | 2017 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | The shape of the hysteresis curve in R-HiPIMS was noticeable different from that one of dc magnetron sputtering operation at the same mean power – the transition from the metallic to compound mode and vice versa were shifted to lower reactive gas supply and the width of the hysteresis curve was reduced. These changes were more pronounced for R-HiPIMS processes with higher ionized fraction of the sputtered species. The modified Berg model assuming that a part of the sputtered and ionized species are back-attracted to the target was developed. |
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