Transition from spokes into a homogeneous plasma in HiPIMS discharge

Warning

This publication doesn't include Faculty of Sports Studies. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	ŠLAPANSKÁ Marta HECIMOVIC Ante BREILMANN Wolfgang HNILICA Jaroslav VAŠINA Petr VON KEUDELL Achim
Year of publication	2017
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	The transition from self-organized plasma into spokes to a homogeneous plasma was studied. In the experiment, the 51-mm-diameter chromium target was used. The transition was investigated by simple biased flat probe, mass spectrometry (MS) and optical emission spectroscopy (OES).
Related projects:	CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy