Transition from spokes into a homogeneous plasma in HiPIMS discharge

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Authors

ŠLAPANSKÁ Marta HECIMOVIC Ante BREILMANN Wolfgang HNILICA Jaroslav VAŠINA Petr VON KEUDELL Achim

Year of publication 2017
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description The transition from self-organized plasma into spokes to a homogeneous plasma was studied. In the experiment, the 51-mm-diameter chromium target was used. The transition was investigated by simple biased flat probe, mass spectrometry (MS) and optical emission spectroscopy (OES).
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