HiPIMS and Ni Doping Induced Structure Reinforcement and Phase Change in nc-TiC/a-C:H Coatings

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Authors	SOUČEK Pavel DANIEL Josef HNILICA Jaroslav BERNÁTOVÁ Katarína ZÁBRANSKÝ Lukáš BURŠÍKOVÁ Vilma STUPAVSKÁ Monika VAŠINA Petr
Year of publication	2017
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	Nanocomposite coatings consisting of nanocrystallites embedded in an amorphous matrix (nc-TiC/a-C:H) can be tailored to exhibit unusual combination of properties such as high hardness and modulus combined with low friction and wear. These coatings are usually deposited utilizing direct current magnetron sputtering (DCMS) leading to low ionization of the sputtered titanium. High Power Impulse Magnetron Sputtering (HiPIMS) depositions usually lead to much higher ionization of the sputtered titanium which can alter the deposition process and in turn the properties of the deposited nc-TiC/a-C:H coatings.
Related projects:	Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy