Carbon Nanotubes Grown by Microwave Torch for Ammonia Gas Detection
| Authors | |
|---|---|
| Year of publication | 2016 |
| Type | Article in Proceedings |
| Conference | WDS'16 Proceedings of Contributed Papers — Physics |
| MU Faculty or unit | |
| Citation | |
| Web | sborník WDS |
| Field | Plasma physics |
| Keywords | carbon nanotubes;microwave plasma torch; gas sensors; anmonnia |
| Attached files | |
| Description | Multi-walled carbon nanotubes (MWCNTs) are highly desirable for the integration into functional devices in particular for sensing applications. MWCNTs for testing the gas sensing properties were prepared on Si substrates coated with SiO2 film. The catalytic Fe films were deposited by vacuum evaporation. Carbon nanotubes (CNTs) were grown in the microwave (MW) plasma torch. The gas sensing properties were determined as a change of the sample resistance upon its exposure to ammonia. The response of the sensors was determined at different ammonia concentrations, namely 100 ppm, 250 ppm and 500 ppm, at room temperature. The chemiresistive sensor exhibited increasing resistance of the MWCNT layer when exposed to ammonia. The response of the sensors at 100 ppm, 250 ppm and 500 ppm NH3 was in the ranges of 0.3–0.9 %, 0.7–1.1 %, and 1.0–1.5 %, respectively. |
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