Time resolved study of Ti sputtered species number densities in multi-pulse  HiPIMS discharge

Warning

This publication doesn't include Faculty of Sports Studies. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	FEKETE Matej HNILICA Jaroslav VITELARU Catalin MINEA Tiberiu VAŠINA Petr
Year of publication	2016
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	A technique based on effective branching fractions was extended to determine the absolute ground state number densities of Ti atoms and Ti ions. The effective branching method was cross validated by TD-LAS technique while studying the dc magnetron sputtering discharge. Influence of preceding pulse on the subsequent pulse in the m-HiPIMS mode was examined as a function of delay (200µs, 400µs and 1500µs) between two successive pulses for the pulse duration of 200µs.
Related projects:	CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy