Deposition of Hard Yet Moderately Ductile MoBC Coatings by p-DC Magnetron Sputtering

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Authors

SOUČEK Pavel BURŠÍKOVÁ Vilma ZÁBRANSKÝ Lukáš BURŠÍK Jiří VAŠINA Petr

Year of publication 2015
Type Article in Proceedings
Conference Potential Application of Plasma and Nanomaterials 2015: Book of Contributed Papers
MU Faculty or unit

Faculty of Science

Citation
Web https://munispace.muni.cz/index.php/munispace/catalog/book/792
Field Plasma physics
Keywords magnetron sputtering; ion flux; nanolaminates; Mo2BC
Description Novel nanolaminated MoBC coatings were prepared using a combination of non-reactive direct current and pulsed direct current magnetron sputtering. Depending on the deposition conditions the coatings were either of amorphous or of nanocomposite nature. Nanocomposite coatings showed good hardness and Young’s modulus and showed no tendency to form cracks even for high-load nanoindentation testing.
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