Antireflexní vrstva z materiálů Al2O3/SiO2 pro hlubokou ultrafialovou (DUV) oblast spektra na vlnové délce 266nm pro úhel dopadu 45°

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Title in English	Antireflection coating consisting of Al2O3/SiO2 materials for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm at AOI 45°
Authors	BŘEZINA Jaromír FRANTA Daniel
Year of publication	2014
MU Faculty or unit	Faculty of Science
Description	*Multi-layer antireflection coating consisting of Al2O3/SiO2 materials for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm at AOI 45°
Related projects:	Optimalizace vrstevnatých systémů používaných v optickém průmyslu