Antireflexní vrstva z materiálů Al2O3/SiO2 pro hlubokou ultrafialovou (DUV) oblast spektra na vlnové délce 266nm

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Title in English	Antireflection coating consisting of Al2O3/SiO2 materials for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm
Authors	BŘEZINA Jaromír OHLÍDAL Ivan
Year of publication	2014
MU Faculty or unit	Faculty of Science
Description	*Multi-layer antireflection coating consisting of Al2O3/SiO2 materials for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm
Related projects:	Optimalizace vrstevnatých systémů používaných v optickém průmyslu