Modelling of Reactive Magnetron Sputtering with Focus on Changes in Target Utilization

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Authors

SCHMIDTOVÁ Tereza VAŠINA Petr

Year of publication 2012
Type Article in Periodical
Magazine / Source Chemické listy
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords reactive magnetron sputtering; modelling; target utilization
Description The paper deals with modelling of reactive magnetron sputtering of titanium with focus on changes in target utilization.
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